Citation

Sim, K.S. and Law, K.K. and Tso, C.P. (2007) Mixed lagrange time delay estimation autoregressive Wiener filter application for real-time SEM image enhancement. Microscopy Research and Technique, 70 (11). pp. 919-927. ISSN 1059910X

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Abstract

A new filter is developed for the enhancement of scanning electron microscope (SEM) images. A mixed La mange time delay estimation auto-regression (MLTDEAR)-based interpo lator is used to provide an estimate of noise variance to a standard Wiener filter. A variety of images are captured and the performance of the filter is shown to surpass the conventional noise filters. As all the information required for processing is extracted from a single image, this method is not constrained by image registration requirements and thus can be applied in real-time in cases where specimen drift is presented in the SEM image.

Item Type:	Article
Subjects:	T Technology > T Technology (General) Q Science > QA Mathematics > QA71-90 Instruments and machines > QA75.5-76.95 Electronic computers. Computer science
Divisions:	Faculty of Engineering and Technology (FET)
Depositing User:	Ms Suzilawati Abu Samah
Date Deposited:	29 Sep 2011 07:01
Last Modified:	29 Sep 2011 07:01
URII:	http://shdl.mmu.edu.my/id/eprint/2984

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