Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer

Mohd-Yasin, F. and Nagel, D. J. and Korman, C. E. and Ong, D. S. and Chuah, H. T. (2007) Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer. In: International Semiconductor Device Research Symposium, 12-14 DEC 2007, College Pk, MD.

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Abstract

Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > T Technology (General)
Q Science > QA Mathematics > QA75.5-76.95 Electronic computers. Computer science
Divisions: Faculty of Engineering and Technology (FET)
Depositing User: Ms Suzilawati Abu Samah
Date Deposited: 07 Oct 2011 06:25
Last Modified: 07 Oct 2011 06:25
URI: http://shdl.mmu.edu.my/id/eprint/3185

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