Citation
Choong, Chwee Lin (2006) Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer. Masters thesis, Multimedia University. Full text not available from this repository.
Official URL: http://myto.perpun.net.my/metoalogin/logina.php
Abstract
In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.
| Item Type: | Thesis (Masters) |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics |
| Divisions: | Faculty of Engineering (FOE) |
| Depositing User: | Ms Rosnani Abd Wahab |
| Date Deposited: | 23 Aug 2010 03:51 |
| Last Modified: | 23 Aug 2010 03:51 |
| URII: | http://shdl.mmu.edu.my/id/eprint/1119 |
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