Citation

YAP, S and TOU, T (2008) Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser. Vacuum, 82 (12). pp. 1449-1451. ISSN 0042207X

Full text not available from this repository.

Abstract

Diamond-like carbon (DLC) films were deposited on p-type silicon (Si-100) substrates by using a pulsed Nd:YAG laser for the ablation of a pyrolytic graphite target at a background pressure of 10(-6) Torr. For a fixed distance of 3 cm between the target and substrate, samples of DLC/Si heterojunction were prepared for two different laser wavelengths of 355 nm and 1064 nm. All DLC films showed typical D and G bands in their Raman spectra. DLC films were also deposited on glass substrates for resistivity measurement by four-point probe. The electrical properties for DLC/Si heterojunctions were analyzed cutrent-voltage measurement at room temperature in the dark and also under illumination. The dependencies of the electrical characteristics on the depositing parameters were discussed. (C) 2008 Elsevier Ltd. All rights reserved.

Item Type:	Article
Subjects:	Q Science > QA Mathematics > QA71-90 Instruments and machines > QA75.5-76.95 Electronic computers. Computer science Q Science > QC Physics
Divisions:	Faculty of Engineering and Technology (FET)
Depositing User:	Ms Suzilawati Abu Samah
Date Deposited:	09 Sep 2011 03:31
Last Modified:	09 Sep 2011 03:31
URII:	http://shdl.mmu.edu.my/id/eprint/2282

Downloads

Edit (login required)