Article

Tin, Tze Chiang and Tan, Saw Chin and Yong, Hing and Kim, Jimmy Ook Hyun and Teo, Eric Ken Yong and Wong, Joanne Ching Yee and Lee, Ching Kwang and Than, Peter and Tan, Angela Pei San and Phang, Siew Chee (2021) The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing. IEEE Access, 9. pp. 114255-114266. ISSN 2169-3536

Tin, Tze Chiang and Tan, Saw Chin and Yong, Hing and Kim, Jimmy Ook Hyun and Teo, Eric Ken Yong and Lee, Ching Kwang and Than, Peter and Tan, Angela Pei San and Phang, Siew Chee (2021) A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective. IEEE Access, 9. pp. 65418-65439. ISSN 2169-3536