Items where Author is "Lee, W.-P."
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Lee, W.-P. and Yow, H.-K. and Tou, T.-Y. (2004) Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope. IEEE Transactions on Semiconductor Manufacturing, 17 (3). pp. 422-431. ISSN 0894-6507