Citation

Kek, Reeson and Koh, Song Foo and Tou, Teck Yong and Yap, Seong Shan (2019) Studies of the properties of Al-doped ZnO at on and off-axis by pulsed laser deposition. In: 14th Asia Pacific Physics Conference (APPC 2019), 17-22 Nov 2019, Borneo Convention Centre Kuching (BCCK),, Kuching , Malaysia.

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Abstract

We report on the characteristics of Al-doped ZnO (AZO) grown on the p-Si (100) and corning glass substrates using pulsed laser deposition in argon gas (16 mTorr) at room temperature. Substrates were placed parallel to the target and the substrate-target distance is 2.5 cm. The substrates were placed at three different positions: position A where it is at the center axis of the plume (on-axis), position B where the substrate is 4.5 cm above the center axis of the plume (offaxis) and position C where the substrate is 4.5 cm below the center axis of the plume (off-axis). Ion probe measurement was used to study the time of flight signal of Zn ion at different positions. The samples were characterized by using scanning electron microscope and atomic force microscope. The optical properties of the samples were studied by using UV-Vis measurement and photoluminescence measurement. AZO thin films were deposited at the center axis (position A) and at 4.5 cm above the center axis (position B). AZO micro/nanostructure was deposited at 4.5 cm below the center axis (position C). The possible mechanisms for the formation of mirco/nanostructure are discussed.

Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	laser deposition
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Divisions:	Faculty of Engineering (FOE)
Depositing User:	Ms Rosnani Abd Wahab
Date Deposited:	28 Jan 2022 02:12
Last Modified:	28 Jan 2022 02:12
URII:	http://shdl.mmu.edu.my/id/eprint/9554

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