Femtosecond laser ablation of tin-doped indium oxide film on PET


Chern, Yang Leong and Guang, Liang Ong and Seong, Shan Yap and Ming, Tao Gan and Chen, Hon Nee (2019) Femtosecond laser ablation of tin-doped indium oxide film on PET. In: XXXIV International Conference on Phenomena of Ionized Gases & 10th International Conference on Reactive Plasmas, 14-19 July 2019, Sapporo Education and Culture Hall, Sapporo, Japan.

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Indium-tin oxide (ITO) is the most important transparent conducting oxide to date. It is normally sputtered coated onto glass and polymers and selectively patterned for use in rigid and flexible electronics. In this work, single pulse laser ablation of ITO coated PET is studied by using a fs laser (1025 nm, 500 fs). Single fs laser pulse is observed to induce ablation of the ITO film at ~ 61 J with a diameter of 50 m. However as the laser energy increases, the surface the PET substrate is also modified. The ablation threshold of ITO thin film is determined to be 0.31 Jcm-1 while the laser induced damage threshold (LIDT) for PET substrate is 0.79 Jcm-1 . The damage at the edge narrows down the optimal laser fluence for ITO removal from PET to be 0.31-0.38 J/cm2 . The effects of laser energy on the surface morphology of both ITO and PET substrates are analysed

Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Rosnani Abd Wahab
Date Deposited: 08 Nov 2021 12:34
Last Modified: 08 Nov 2021 12:34
URII: http://shdl.mmu.edu.my/id/eprint/9288


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