Signal-to-noise ratio estimation on SEM images using cubic spline interpolation with Savitzky–Golay smoothing

Citation

Sim, K. S. and Kiani, M. A. and Nia, M. E. and Tso, C. P. (2014) Signal-to-noise ratio estimation on SEM images using cubic spline interpolation with Savitzky–Golay smoothing. Journal of Microscopy, 253 (1). pp. 1-11.

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Abstract

A new technique based on cubic spline interpolation with Savitzky–Golay noise reduction filtering is designed to estimate signal-to-noise ratio of scanning electron microscopy (SEM) images. This approach is found to present better result when compared with two existing techniques: nearest neighbourhood and first-order interpolation. When applied to evaluate the quality of SEM images, noise can be eliminated efficiently with optimal choice of scan rate from real-time SEM images, without generating corruption or increasing scanning time.

Item Type: Article
Subjects: T Technology > T Technology (General)
Divisions: Faculty of Engineering and Technology (FET)
Depositing User: Ms Nurul Iqtiani Ahmad
Date Deposited: 10 Mar 2014 09:16
Last Modified: 10 Mar 2014 09:16
URII: http://shdl.mmu.edu.my/id/eprint/5345

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