Characterization Of SEM Charging Effects


Tan, Yik Yee (2007) Characterization Of SEM Charging Effects. Masters thesis, Multimedia University.

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The research has demonstrated the potential for charging effect identification. Then the dynamic range compensation technique helps to further improve the charging image quality. This achievement is definitely useful for SEM applications.

Item Type: Thesis (Masters)
Subjects: Q Science > QH Natural history
Divisions: Faculty of Engineering and Technology (FET)
Depositing User: Ms Rosnani Abd Wahab
Date Deposited: 27 Sep 2010 07:52
Last Modified: 27 Sep 2010 07:52


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