Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers

Lee , Wah Pheng (2005) Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers. PhD thesis, Multimedia University.

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Abstract

In microelectronics, cost reduction and improved performance requires device miniaturization in the ultra large scale integration (ULSI) chip. The consequence is that minute structural defects and contamination, not previously considered, on the silicon wafer become increasingly critical to the device reliability and manufacturing yield. While the contamination may be removed from the silicon surface by wet cleaning, the grown-in defects will not be cleaned. The latter includes the truncated voids which appear as pits on the polished surface, and are often known as the crystal-originated "particles" (COPs).

Item Type: Thesis (PhD)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Rosnani Abd Wahab
Date Deposited: 06 Jul 2010 04:11
Last Modified: 06 Jul 2010 04:11
URI: http://shdl.mmu.edu.my/id/eprint/856

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