Pulsed laser deposition of Al-doped ZnO films on glass and polycarbonate


Tan, Kwan Chu and Lee, Yen Sian and Yap, Seong Ling and Kok, Soon Yie and Nee, Chen Hon and Siew, Wee Ong and Tou, Teck Yong and Yap, Seong Shan (2014) Pulsed laser deposition of Al-doped ZnO films on glass and polycarbonate. Journal of Nanophotonics, 8 (1). ISSN 1934-2608

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Al-doped ZnO (AZO) films were deposited on glass and polycarbonate (PC) at room temperature by using pulsed Nd:YAG laser at 355 nm. AZO thin films were obtained for both substrates at laser fluences from 2 to 5  J/cm2 in O2 partial pressure of 2.1 Pa. The effects of laser fluence on the structural, electrical, and optical properties of the films were investigated. The films with lowest resistivity and highest transmittance have been obtained at 2  J/cm2. The resistivities were 2.29×10−3  Ω cm for AZO on glass and 1.49×10−3  Ω cm for AZO on PC. With increasing laser fluence, the deposited films have lower crystallinity, higher resistivity, and smaller optical bandgap.

Item Type: Article
Additional Information: Special Section on Nanophotonic Materials and Devices
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Nurul Iqtiani Ahmad
Date Deposited: 22 Dec 2014 09:41
Last Modified: 13 May 2015 08:28
URII: http://shdl.mmu.edu.my/id/eprint/5869


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