Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films

Lee , Wai Keat (2010) Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films. Masters thesis, University of Multimedia.

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Abstract

Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the interesting chemical, physical, and electrical properties it possessed.

Item Type: Thesis (Masters)
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Faculty of Engineering and Technology (FET)
Depositing User: Ms Suzilawati Abu Samah
Date Deposited: 23 Mar 2012 04:16
Last Modified: 23 Mar 2012 04:16
URI: http://shdl.mmu.edu.my/id/eprint/3411

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