Low frequency noise measurement and analysis of capacitive micro-accelerometers: Temperature effect

Citation

Mohd Yasin, Faisal and Nagel, David J. and Ong, D. S. and Korman, Can E. and Chuah, Hean Teik (2007) Low frequency noise measurement and analysis of capacitive micro-accelerometers: Temperature effect. In: 2007 Digest of papers Microprocesses and Nanotechnology, 05-08 Nov 2007, Kyoto, Japan.

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Abstract

In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data show that the noise power increases at high temperature, but not as significant as predicted by the theory.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: accelerometers , noise , acceleration-dependent , temperature-dependence
Subjects: T Technology > T Technology (General)
Q Science > QA Mathematics > QA71-90 Instruments and machines > QA75.5-76.95 Electronic computers. Computer science
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Suzilawati Abu Samah
Date Deposited: 07 Oct 2011 08:28
Last Modified: 23 Feb 2023 07:56
URII: http://shdl.mmu.edu.my/id/eprint/3169

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