Low frequency noise measurement and analysis of capacitive micro-accelerometers


Mohd Yasin, Faisal and Nagel, David J. and Ong, Duu Sheng and Korman, Can E. and Chuah, Hean Teik (2007) Low frequency noise measurement and analysis of capacitive micro-accelerometers. Microelectronic Engineering, 84 (5-8). pp. 1788-1791. ISSN 0167-9317

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Noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. Unexpected resonances are also observed in the commercial devices. Most importantly, an acceleration dependent of the noise is found in analog devices and freescale accelerometers, in contrast to prevailing theory.

Item Type: Article
Subjects: T Technology > T Technology (General)
Q Science > QA Mathematics > QA71-90 Instruments and machines > QA75.5-76.95 Electronic computers. Computer science
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Suzilawati Abu Samah
Date Deposited: 29 Sep 2011 04:04
Last Modified: 23 Feb 2023 07:59
URII: http://shdl.mmu.edu.my/id/eprint/3058


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