Citation
Kang, Ban Hong (2006) Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers. Masters thesis, Multimedia University. Full text not available from this repository.
Official URL: http://myto.perpun.net.my/metoalogin/logina.php
Abstract
The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd, which was located in the free trade zone, Ulu Klang, Selangor.
| Item Type: | Thesis (Masters) |
|---|---|
| Subjects: | Q Science > QC Physics |
| Divisions: | Faculty of Engineering (FOE) |
| Depositing User: | Ms Rosnani Abd Wahab |
| Date Deposited: | 05 Aug 2010 03:42 |
| Last Modified: | 05 Aug 2010 03:42 |
| URII: | http://shdl.mmu.edu.my/id/eprint/1089 |
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