Fabrication and characterization of platinum/barium strontium titanate/nickel-iron/copper capacitor for storage application

Ruthramurthy, Balachandran (2012) Fabrication and characterization of platinum/barium strontium titanate/nickel-iron/copper capacitor for storage application. PhD thesis, Multimedia University.

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Abstract

In this research work, a new capacitor stack platinum/barium strontium titanate/nickel-iron/copper (Pt/BST/Ni-Fe/Cu) has been designed and fabricated with platinum as top electrode, barium strontium titanate (Ba0.5Sr0.5TiO) as dielectric material and nickel-iron thin film deposited copper substrate (Ni-Fe/Cu) as bottom electrode. This capacitor is used for storage application like a dynamic random access memory cell. The as-fabricated capacitor offered dielectric constant of 690, dielectric loss of 0.05 at frequency of 1 kHz and leakage current density of 33 nA/cm2 for ± 5 V.

Item Type: Thesis (PhD)
Additional Information: Call No.: TK7895.M4 B35 2012
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Nurul Iqtiani Ahmad
Date Deposited: 23 Oct 2014 04:18
Last Modified: 23 Oct 2014 04:18
URI: http://shdl.mmu.edu.my/id/eprint/5789

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