Citation
Koh, Song Foo (2014) Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer. PhD thesis, Multimedia University. Full text not available from this repository.
Official URL: http://library.mmu.edu.my/diglib/onlinedb/dig_lib....
Abstract
Copper (Cu) and iron (Fe) impurities in the silicon bulk of highly borondoped silicon wafers were investigated using the Dynamic Secondary Ion Mass Spectrometry (D-SIMS). Competition between segregation at the highly boron-doped and polysilicon layer was observed. Enhanced gettering into polysilicon layer after subjecting to a combined effect of isothermal annealing and electric field (40 kV/cm) was attributed to the thermally induced dissociations of Cu and Fe complexes and field-enhanced directional drift of positive Cu and Fe interstitials (CuI) towards the polysilicon sink.
| Item Type: | Thesis (PhD) |
|---|---|
| Additional Information: | Call No.: TK7871.85 K64 2014 |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics |
| Divisions: | Faculty of Engineering (FOE) |
| Depositing User: | Ms Nurul Iqtiani Ahmad |
| Date Deposited: | 11 Sep 2014 06:42 |
| Last Modified: | 11 Sep 2014 06:42 |
| URII: | http://shdl.mmu.edu.my/id/eprint/5728 |
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