A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering

Hoon , Jian Wei (2011) A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering. Masters thesis, Multimedia University.

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Abstract

This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the processing technology for the fabrication of ZnO films.

Item Type: Thesis (Masters)
Subjects: Q Science > QC Physics
Divisions: Faculty of Engineering (FOE)
Depositing User: Users 1102 not found.
Date Deposited: 25 Feb 2013 00:38
Last Modified: 25 Feb 2013 00:38
URI: http://shdl.mmu.edu.my/id/eprint/3840

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