Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer

Choong, Chwee Lin (2006) Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer. Masters thesis, Multimedia University.

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Abstract

In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.

Item Type: Thesis (Masters)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Engineering (FOE)
Depositing User: Ms Rosnani Abd Wahab
Date Deposited: 23 Aug 2010 03:51
Last Modified: 23 Aug 2010 03:51
URI: http://shdl.mmu.edu.my/id/eprint/1119

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